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process-cassettes
WHS-M1-18077
Aluminum cassettes
Wafer handling products
13-slots
Flat Slot
process-cassettes
WHS-M1-5
Aluminum cassettes
Wafer handling products
The WHS-M1 Series MCF is an all aluminum 76 mm (3") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
76 mm (3”)
Cover-plate or H-bar
25-slots
process-cassettes
WHS-M1-6
Aluminum cassettes
Wafer handling products
The WHS-M1 Series MCF is an all aluminum 100 mm (4") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
100 mm (4”)
Cover-plate or H-bar
25-slots
process-cassettes
WHS-M1-7
Aluminum cassettes
Wafer handling products
The WHS-M1 Series MCF is an all aluminum 150 mm (6") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
150 mm (6”)
Cover-plate or H-bar
25-slots
process-cassettes
WHS-M1-8
Aluminum cassettes
Wafer handling products
The WHS-M1 Series MCF is an all aluminum 200 mm (8") 25-slot metal cassette with option a end wall handle for processing semiconductor wafers in a thermal
200 mm (8”)
Cover-plate or H-bar
25-slots
process-cassettes
WHS-M2
Legacy cassettes
Wafer handling products
The M2 series AMC is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C.
76 mm (3”), 100 mm (4”), 150 mm (6”) or 200 mm (8”)
Angular
25-slots
process-cassettes
WHS-M2-H
Metal cassette handles
Wafer handling products
process-cassettes
WHS-M2-TP
Legacy cassettes
Wafer handling products
The M2 series AMC is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C.
process-cassettes
WHS-M3
Stainless steel cassettes
Wafer handling products
process-cassettes
WHS-M4-1807002
300 mm cassettes
Wafer handling products
300 mm (12”)
T6061 aluminum alloy
(HC) hard clear anodization
350° C
ISO 3 (Class 1 FS209E)