Stainless Steel Cassette 100 mm (4”)

Applications:

• Bake - Long term thermal bake applications where wafers are left in ovens for multiple days.
• Thin Wafer Handling - Thin wafer handling where sharp thin wafers cut into plastic cassettes.
• Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.
• Ultrasonic and megasonic  - cleaning applications where open side wall stainless steel cassettes perform better than soundwave dampening plastic cassettes.

The WHS-M3 series is a high-temperature stainless steel cassette designed for handling semiconductor wafers in extreme thermal processes. Unlike other stainless-steel cassettes in the industry that rely on weak welded or bent sheet metal designs prone to losing dimensional stability, the WHS-M3 is engineered to provide a robust, long-term solution. It maintains structural integrity and remains reliable for automation use, even after prolonged exposure to high temperatures, making it a dependable choice for years of operation in harsh cleanroom environments.

Built for wafers ranging from 76mm (3") to 200mm (8") in diameter, the M3 cassette is perfect for applications such as bake processes, thermal automation, and ultrasonic or megasonic cleaning. Constructed from electro-polished (EP) type 316 stainless steel, the WHS-M3 offers superior corrosion resistance and long-lasting durability, supporting cleanroom applications with temperatures up to 550°C.

Its SEMI-compliant 25-slot design, featuring an 8° slot angle, mirrors the profile of standard plastic cassettes, allowing seamless integration into automation systems while delivering enhanced thermal performance.

Available in 76mm, 100mm, 150mm, and 200mm sizes, the M3 cassette also offers custom configurations, including 13-slot designs and flat slot profiles for special wafer handling.

Manufactured in an ISO9001 certified facility and CE certified, the WHS-M3 ensures reliable, long-term performance in the most demanding semiconductor environments, with short lead times and small minimum order quantities for custom configurations.