POLOS NanoWriter Series
The POLOS NanoWriter is a versatile UV Direct
Laser Writer with ultra high precision components,
specifically designed to give the user the
highest degree of freedom to create
microstructures in photosensitive layers.
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Handling & Shipping
Product for safe substrate handling,
transfer or sorting of wafers. Solutions
for shipping and storage of substrates.
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Wet Process
Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.
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Thin Films
Systems for thin films, ranging from CVD and ALD
atomic layer deposition to gas filters and heating
elements for diffusion ovens.
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Photolithography
Products for safe storage and
handling of reticles, as well as mask
aligners and uv meters.
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SPS-International

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CMP

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Handling & Shipping

Products for safe substrate handling, transfer or sorting
of wafers. Solutions for shipping and storage of substrates.

Handling-Shipping

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Photolithography

Products for safe storage and handling of reticles,
as well as mask aligners and spin coaters.

Photolithography

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Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

Thin-Films

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Wetprocess

Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.

Wetprocess

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Innovative Products for Semiconductor Processes

Looking for second source or the original OEM parts?
Upgrade your existing SAT, SST or CMP tool? Safe handling of thin wafers?

Every day, you are being challenged, to create smaller and more powerful microchips in the cleanest and most

cost-efficient way possible. With the expertise of SPS Europe in wafer handling tools and wet process equipment,

we offer you a wide range of semiconductor equipment products and customized solutions for all your major

process steps. Read more>

Why SPS-Europe?

Since 1988
Customized solutions
Personal contact
Wide product range
7 local offices

SPS offers you

Services

Refurbish your existing tool? Finding the right part? Dedication towards our customers and flexibility in finding the right solution, combined with application knowledge and fast supply logistics.

Wide product range

Fast supply from stock? SPS-Europe stock well over 9,000 parts for wafer handling, vacuum wands, wafer shipping boxes to in-line heaters, chemical pumps and fittings for wet process applications.

Custom solutions

Looking for a 1:1 replacement? Or improve on your existing semiconductor equipment? We offer original OEM-parts for wet process equipment, robot refurbishment and Semitool upgrades.