• POLOS NanoWriter Series

    The POLOS NanoWriter is a versatile UV Direct
    Laser Writer with ultra high precision components,
    specifically designed to give the user the
    highest degree of freedom to create
    microstructures in photosensitive layers.

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  • Handling & Shipping

    Product for safe substrate handling,
    transfer or sorting of wafers. Solutions
    for shipping and storage of substrates.

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  • Wet Process

    Process equipment for heated DI water and
    chemical supply, including chemical pumps, PFA
    fittings and process baths or wet etch equipment.

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  • Thin Films

    Systems for thin films, ranging from CVD and ALD
    atomic layer deposition to gas filters and heating
    elements for diffusion ovens.

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  • Photolithography

    Products for safe storage and
    handling of reticles, as well as mask
    aligners and uv meters.

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SPS-International

 

Select productgroup and find your product

handling-shipping

Handling & Shipping

Products for safe substrate handling, transfer or sorting
of wafers. Solutions for shipping and storage of substrates.

photolithography

Photolithography

Products for safe storage and handling of reticles,
as well as mask aligners and spin coaters.

thin-films

Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

wetprocess

Wetprocess

Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.

 

Innovative Products for Semiconductor Processes

Looking for second source or the original OEM parts?
Upgrade your existing SAT, SST or CMP tool? Safe handling of thin wafers?

 
Every day, you are being challenged, to create smaller and more powerful microchips in the cleanest and most
cost-efficient way possible. With the expertise of SPS Europe in wafer handling tools and wet process equipment,
we offer you a wide range of semiconductor equipment products and customized solutions for all your major
process steps. Read more>
 
                                                                                                                 


Why SPS-Europe?

  • Since 1988
  • Customized solutions
  • Personal contact
  • Wide product range
  • 7 local offices

SPS offers you

Services

Refurbish your existing tool? Finding the right part? Dedication towards our customers and flexibility in finding the right solution, combined with application knowledge and fast supply logistics.

Wide product range

Fast supply from stock? SPS-Europe stock well over 9,000 parts for wafer handling, vacuum wands, wafer shipping boxes to in-line heaters, chemical pumps and fittings for wet process applications.

Custom solutions

Looking for a 1:1 replacement? Or improve on your existing semiconductor equipment? We offer original OEM-parts for wet process equipment, robot refurbishment and Semitool upgrades.

Select productgroup and find your product

handling-shipping

Handling & Shipping

Products for safe substrate handling, transfer or sorting
of wafers. Solutions for shipping and storage of substrates.

photolithography

Photolithography

Products for safe storage and handling of reticles,
as well as mask aligners and spin coaters.

thin-films

Thin Films

Systems for thin films, ranging from CVD and ALD atomic layer
deposition to gas filters and heating elements for diffusion ovens.

wetprocess

Wetprocess

Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.

 

SPS in numbers

9355
Products
42
Employees
33
Years
2675
Semiconductor companies buy from us

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Polishing Services
 

POLOS NanoWriter Advanced direct laser writer

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Spin coaters
 

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Contact with SPS

Shall we come to you? Or will you visit us?
 

Where do we meet?

 

15-05 - 17-05 2023 - CS Mantech - Orlando, Florida 
Booth: 214 - Get your ticket on https://csmantech.org

15-05 - 17-05 2023 - ENRIS 2023 Paris-Saclay, FR
Booth: A3 - Get your ticket on: https://euronanolab.eu/enris-2023/
 

23-05 - 25-05 2023 - Semicon Southeast Asia Penang, MA
Booth #C102 Get your ticket on: https://www.semiconsea.org/

11-07 - 13-07 2023 Semicon West 2023 San Francisco, USA
Booth 144 Get your ticket on: https://www.semiconwest.org/

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