WHS

PROCESS ALUMINUM CASSETTE, (AL, HC) 4" - 25 SLOT, SLOT-SHAPE ANGULAR

PROCESS ALUMINUM CASSETTE, (AL, HC) 4" - 25 SLOT, SLOT-SHAPE ANGULAR
WHS

PROCESS ALUMINUM CASSETTE, (AL, HC) 4" - 25 SLOT, SLOT-SHAPE ANGULAR

Choose your size:
Aluminum with wear-resistant, smooth hard-coating
Heat-resistant up to 350°C (Al)
Smooth slot-entry and -shapeVacuum vented screws
Design according to SEMI-standard

The M1 series is an all aluminum 100 mm (4") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C. A SEMI compliant cassette with outside dimensions and 8° angular slots similar to an industry standard plastic cassette for easy integration into stage and transfer automation considerations. All aluminum surfaces are (HC) hard clear anodized for prolonged abrasion resistance.Custom configurations available (may incur minimum order quantity amounts): EN-electroless nickel plating on aluminum types for high-vacuum applications; flat profile slotting for thin or thick wafers; end-wall fixed handles; dual h-bar configurations for backside wafer processing.
Please send your requests to sales@waferhandlingsystems.com