PROCESS ALUMINUM CASSETTE, (AL, HC) 4" - 25 SLOT, SLOT-SHAPE ANGULAR

WHS-M1 Aluminum Metal Cassette

The WHS-M1 series is a precision-engineered, all-aluminum cassette designed for processing semiconductor wafers in high-temperature environments, up to 350°C. Built to meet SEMI standards, this metal cassette offers enhanced durability and thermal performance, ideal for processes like chemical vapor deposition (CVD), rapid thermal processing (RTP), and wafer annealing.

With outside dimensions matching industry-standard plastic cassettes, the WHS-M1 integrates seamlessly into existing stage and transfer automation systems. It is available in 25-slot (8° slot profile) for automated applications. The cassette’s all-aluminum construction, with hard clear (HC) anodized surfaces, ensures long-lasting abrasion resistance, making it suitable for ISO 3 (FS209E Class 1) cleanroom environments.

Available in a 100mm model, the WHS-M1 is offered with short lead times and at an economical price. For custom applications, the cassette can be ordered with electroless nickel plating (EN) for vacuum environments, double H-bar for flipping and inverting operations, alternative slot profiles for thicker substrates, and options for with or without end-wall handles. A small minimum order quantity is required for custom configurations.

The WHS-M1 excels in high-temperature environments where plastic cassettes fail, making it ideal for bake processes, precision handling of thin and thick wafers, and high wafer insertion temperatures.

Manufactured in an ISO9001 certified facility and CE certified, the WHS-M1 meets global standards for quality and reliability, offering a high-performance solution for wafer handling in semiconductor process environments.