PROCESS ALUMINUM CASSETTE, (AL, HC) 8" - 25 SLOT, SLOT-SHAPE ANGULAR

The M1 series is an all aluminum 200 mm (8") 25-slot metal cassette with option a end wall handle for processing semiconductor wafers in a thermal environment, up to 350° C. A SEMI compliant cassette with outside dimensions and 8° angular slots similar to an industry standard plastic cassette for easy integration into stage and transfer automation considerations. All aluminum surfaces are (HC) hard clear anodized for prolonged abrasion resistance.Custom configurations available (may incur minimum order quantity amounts): EN-electroless nickel plating on aluminum types for high-vacuum applications; flat profile slotting for thin or thick wafers; end-wall fixed handles; dual h-bar configurations for backside wafer processing.
Please send your requests to sales@waferhandlingsystems.com