Wafer handling products

PROCESS ALUMINUM CASSETTE BI-PITCH 13 SLOT FLAT SLOT -/thick wafers 76 mm (3”)

PROCESS ALUMINUM CASSETTE BI-PITCH  13 SLOT FLAT SLOT -/thick wafers 76 mm (3”)
Wafer handling products

PROCESS ALUMINUM CASSETTE BI-PITCH 13 SLOT FLAT SLOT -/thick wafers 76 mm (3”)

Choose your size:
Handles high-temperature processing up to 350°C 
 Available in 76mm, 100mm, 150mm, and 200mm sizes
 Hard anodized aluminum for durability in ISO 3 cleanrooms
 Custom options: nickel plating, double H-bar, and slot profiles

Applications:

  • Process Equipment - Thermal processes environments where the wafer is processed in the cassette above 43° C (110° F), the typical structural threshold upper limit of plastic process cassettes.  This includes chemical vapor deposition (CVD), rapid thermal processing (RTP) and wafer annealing applications.
  • Bake - Long term thermal bake applications where wafers are left in ovens for multiple days.
  • High wafer insertion temperatures - Process equipment where wafer insertion temperatures (wafers coming out from the process tool) exceed the melting point of a plastic cassette.  The need for higher throughput reduces the amount of time the wafers are left inside the chamber to cool and acclimate. 
  • Internal environment cassette - Cluster tool automation environments where a cassette is idle inside a heated vacuum environment (chamber) for multiple process steps.
  • Precision carrier requirements - Moderate-thermal automation environments where there is a need for dimensional precision that a plastic cassette cannot offer.
  • Thin Wafer Handling - Thin wafer handling where sharp thin wafers cut into plastic cassettes.
  • Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.

 

The WHS-M1 series is a precision-engineered, all-aluminum cassette designed for processing semiconductor wafers in high-temperature environments, up to 350°C. Built to meet SEMI standards, this metal cassette offers enhanced durability and thermal performance, ideal for processes like chemical vapor deposition (CVD), rapid thermal processing (RTP), and wafer annealing.

With outside dimensions matching industry-standard plastic cassettes, the WHS-M1 integrates seamlessly into existing stage and transfer automation systems. It is available in 13-slot (0° slot profile) for thin wafer handling. The cassette’s all-aluminum construction, with hard clear (HC) anodized surfaces, ensures long-lasting abrasion resistance, making it suitable for ISO 3 (FS209E Class 1) cleanroom environments.

Available in a 76mm model, the WHS-M1 is offered with short lead times and at an economical price. For custom applications, the cassette can be ordered with electroless nickel plating (EN) for vacuum environments, double H-bar for flipping and inverting operations, alternative slot profiles for thicker substrates, and options for with or without end-wall handles. A small minimum order quantity is required for custom configurations.

The WHS-M1 excels in high-temperature environments where plastic cassettes fail, making it ideal for bake processes, precision handling of thin and thick wafers, and high wafer insertion temperatures.

Manufactured in an ISO9001 certified facility and CE certified, the WHS-M1 meets global standards for quality and reliability, offering a high-performance solution for wafer handling in semiconductor process environments.