Wafer handling products
PROCESS ALUMINUM CASSETTE, (AL, HC) 6" - 25 SLOT, SLOT-SHAPE ANGULAR H-BAR (TOP), H-BAR (BOTTOM)
Wafer handling products
PROCESS ALUMINUM CASSETTE, (AL, HC) 6" - 25 SLOT, SLOT-SHAPE ANGULAR H-BAR (TOP), H-BAR (BOTTOM)
Choose your size:
Aluminum with wear-resistant, smooth hard-coating
Heat-resistant up to 350°C (Al)
Smooth slot-entry and -shapeVacuum vented screws
Design according to SEMI-standard
The M1 series is an all aluminum 150 mm (6") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C. A SEMI compliant cassette with outside dimensions and 8° angular slots similar to an industry standard plastic cassette for easy integration into stage and transfer automation considerations. All aluminum surfaces are (HC) hard clear anodized for prolonged abrasion resistance.
Brand
Wafer handling products
Product Number
WHS-M1-1807776
Remarks
Without handle
Material
Aluminum - Finish: Hard Clear Anodized (HC)
Size
150 mm (6”)
Slots
H-bar / H-bar
Top/Bottom
25-slots
Status
Request information