Stainless steel cassettes

The WHS-M3 series is a high temperature stainless steel from 76 (3") up to 200 mm (8”) diameter wafers. SEMI compliant 25-slot, 8° slot angle in the profile of an industry plastic cassette. Electro polished (EP) type 316 stainless steel.  For thermal automation processing, general bake applications up to 550°C; or mega- and ultra- sonic cleaning applications.