PROCESS ALUMINUM CASSETTE, (AL, HC) 4" - 25 SLOT, SLOT-SHAPE ANGULAR COVER-PLATE (TOP), H-BAR (BOTTOM)

The M1 series is an all aluminum 100 mm (4") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C. A SEMI compliant cassette with outside dimensions and 8° angular slots similar to an industry standard plastic cassette for easy integration into stage and transfer automation considerations. All aluminum surfaces are (HC) hard clear anodized for prolonged abrasion resistance.