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Material
Aluminum | Finish: Hard Clear Anodized (HC)
Wafer sizes
300 mm (12”)
Material
T6061 aluminum alloy
Surface finish
(HC) hard clear anodization
Max temperature
350° C
Cleanliness
ISO 3 (Class 1 FS209E)

300 mm cassettes

Our WHS M4 Serie aluminum metal cassette for 300 mm (12”) diameter wafers. SEMI compliant 25-slot, 10 mm (0.393”) pitch cassette with kinematic couplings and side handles in the profile of an industry FOUP. Features locking lock bar for safe wafer transport. Hard clear (HC) anodized abrasion resistant aluminum surface finish.  For thermal automation processing and general bake applications up to 350°C.

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process-cassettes
WHS-M4-1807002
300 mm cassettes
Wafer handling products
300 mm Aluminum Metal Process Cassette
300 mm (12”)
T6061 aluminum alloy
(HC) hard clear anodization
350° C
ISO 3 (Class 1 FS209E)