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Replacement cassettes
(1)Stainless steel cassettes
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(5)300 mm cassettes
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(1)Material
Aluminum | Finish: Hard Clear Anodized (HC)
Stainless Steel
Wafer sizes
(12”) 300 mm
Material
Stainless Steel
T6061 aluminum alloy
Surface finish
(HC) hard clear anodization
Max temperature
350° C
550° C
Cleanliness
ISO 3 (Class 1 FS209E)
300 mm cassettes
Our WHS M4 Serie aluminum metal cassette for 300 mm (12”) diameter wafers. SEMI compliant 25-slot, 10 mm (0.393”) pitch cassette with kinematic couplings and side handles in the profile of an industry FOUP. Features locking lock bar for safe wafer transport. Hard clear (HC) anodized abrasion resistant aluminum surface finish. For thermal automation processing and general bake applications up to 350°C.
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Metal Cassettes
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Category
Replacement cassettes
(1)Stainless steel cassettes
(1)Legacy cassettes
(2)Aluminum cassettes
(5)300 mm cassettes
(2)Metal cassette handles
(1)Material
Aluminum | Finish: Hard Clear Anodized (HC)
Stainless Steel
Wafer sizes
(12”) 300 mm
Material
Stainless Steel
T6061 aluminum alloy
Surface finish
(HC) hard clear anodization
Max temperature
350° C
550° C
Cleanliness
ISO 3 (Class 1 FS209E)
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process-cassettes
WHS-M4-1807000
300 mm cassettes
Wafer handling products
(12”) 300 mm
Stainless Steel
550° C
ISO 3 (Class 1 FS209E)
process-cassettes
WHS-M4-1807002
300 mm cassettes
Wafer handling products
(12”) 300 mm
T6061 aluminum alloy
(HC) hard clear anodization
350° C
ISO 3 (Class 1 FS209E)


