The M1 series is an all aluminum 200 mm (8") 25-slot metal cassette with option a end wall handle for processing semiconductor wafers in a thermal environment, up to 350° C. A SEMI compliant cassette with outside dimensions and 8° angular slots similar to an industry standard plastic cassette for easy integration into stage and transfer automation considerations. All aluminum surfaces are (HC) hard clear anodized for prolonged abrasion resistance.