WHS
300 mm Aluminum Metal Process Cassette
WHS
300 mm Aluminum Metal Process Cassette
High Temperature Applications up to 350°C
Strong, Dimensionally Stable Design
SEMI 300mm Automation Compliant
Long Lasting Abrasion Resistant Materials
Ergonomic Fix-Mounted Side Handles
Locking Bar for Safe Transport
Lighter than FOUP
Brand
WHS
Product Number
WHS-M4-1807002
Color
With Handle
Material
Aluminum | Finish: Hard Clear Anodized (HC)
Size
300 mm (12”)
Slots
25 Slots
Top/Bottom
Cover-plate (top) - Docking Option (bottom)
Status
Request information
Applications:
- Bake - Long term thermal bake applications where wafers are left in ovens for multiple days.
- Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.
Our WHS M4 Serie aluminum metal cassette for 300 mm (12”) diameter wafers. SEMI compliant 25-slot, 10 mm (0.393”) pitch cassette with kinematic couplings and side handles in the profile of an industry FOUP. Features locking lock bar for safe wafer transport. Hard clear (HC) anodized abrasion resistant aluminum surface finish. For thermal automation processing and general bake applications up to 350°C.