300 mm Aluminum Metal Process Cassette

Applications:

• Bake - Long term thermal bake applications where wafers are left in ovens for multiple days.
   
• Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.

Our WHS M4 Serie aluminum metal cassette for 300 mm (12”) diameter wafers. SEMI compliant 25-slot, 10 mm (0.393”) pitch cassette with kinematic couplings and side handles in the profile of an industry FOUP. Features locking lock bar for safe wafer transport. Hard clear (HC) anodized abrasion resistant aluminum surface finish.  For thermal automation processing and general bake applications up to 350°C.