300 mm Aluminum Metal Process Cassette
300 mm Aluminum Metal Process Cassette
WHS-M4 Aluminum Metal Cassette for 300mm Wafers
Applications:
- Bake - Long term thermal bake applications where wafers are left in ovens for multiple days.
- Thick Wafers - Bonded or thick wafer applications where industry standard plastic cassettes will not work due to slot dimensions.
The WHS-M4 series is a lightweight aluminum cassette designed for 300mm (12") wafers in high-temperature environments. SEMI compliant and compatible with all 300mm load ports, it integrates smoothly into automated systems. Available with a hard clear anodized (HC) or electroless nickel plated (EN) surface finish, the M4 cassette offers superior durability and abrasion resistance for long-term thermal processing and bake applications up to 350°C. The EN finish is ideal where a conductive surface is required.
The WHS-M4 features a 25-slot, 10mm (0.393") pitch design that mirrors the profile of an industry-standard FOUP but with reduced weight, making it easier to handle manually while still ensuring precise wafer placement. For added safety, the cassette is equipped with a locking latch bar to prevent wafers from sliding out during manual transport, even if an operator makes an error.
Designed with operator comfort in mind, the SEMI S8 compliant side handles feature a power grip profile for secure, controlled handling during manual operations.
The WHS-M4 is ideal for handling thick or bonded wafers, providing a robust, high-performance solution for 300mm wafer management in cleanroom environments.
Manufactured in an ISO9001 certified facility and CE certified, the WHS-M4 guarantees long-term reliability and safety for semiconductor thermal and automated processing environments.