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Stainless steel cassettes
(1)Legacy cassettes
(2)Aluminum cassettes
(5)300 mm cassettes
(1)Metal cassette handles
(1)Material
Aluminum - Finish: Hard Clear Anodized (HC)
Wafer sizes
(3”) 76 mm
(4”) 100 mm
(6”) 150 mm
(8”) 200 mm
Material
T6061 aluminum alloy
Surface finish
(HC) hard clear anodization
Max temperature
350° C
Cleanliness
ISO 3 (Class 1 FS209E)
Aluminum cassettes
The WHS-M1 series is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C. A SEMI compliant cassette with outside dimensions and 8° angular slots similar to an industry standard plastic cassette for easy integration into stage and transfer automation considerations. All aluminum surfaces are (HC) hard clear anodized for prolonged abrasion resistance. Custom configurations available (may incur minimum order quantity amounts): EN-electroless nickel plating on aluminum types for high-vacuum applications; flat profile slotting for thin or thick wafers; end-wall fixed handles; dual h-bar configurations for backside wafer processing.
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Metal Cassettes
Refine
Category
Stainless steel cassettes
(1)Legacy cassettes
(2)Aluminum cassettes
(5)300 mm cassettes
(1)Metal cassette handles
(1)Material
Aluminum - Finish: Hard Clear Anodized (HC)
Wafer sizes
(3”) 76 mm
(4”) 100 mm
(6”) 150 mm
(8”) 200 mm
Material
T6061 aluminum alloy
Surface finish
(HC) hard clear anodization
Max temperature
350° C
Cleanliness
ISO 3 (Class 1 FS209E)
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process-cassettes
WHS-M1-18077
Aluminum cassettes
Wafer handling products
13-slots
Flat Slot
process-cassettes
WHS-M1-5
Aluminum cassettes
Wafer handling products
The WHS-M1 Series MCF is an all aluminum 76 mm (3") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
(3”) 76 mm
Cover-plate or H-bar
25-slots
process-cassettes
WHS-M1-6
Aluminum cassettes
Wafer handling products
The WHS-M1 Series MCF is an all aluminum 100 mm (4") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
(4”) 100 mm
Cover-plate or H-bar
25-slots
process-cassettes
WHS-M1-7
Aluminum cassettes
Wafer handling products
The WHS-M1 Series MCF is an all aluminum 150 mm (6") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
(6”) 150 mm
Cover-plate or H-bar
25-slots
process-cassettes
WHS-M1-8
Aluminum cassettes
Wafer handling products
The WHS-M1 Series MCF is an all aluminum 200 mm (8") 25-slot metal cassette with option a end wall handle for processing semiconductor wafers in a thermal
(8”) 200 mm
Cover-plate or H-bar
25-slots