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Flow Meters
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(1)
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(1)
Brand
ESPRO
MALEMA
Tokyo Keiso CO., LTD.
Material
All wetted parts of PFA
Body: All PFA, without o-rings
Heat resistant ABS resin (white)
Flow range
±0.016 L/min for 0.8 L/min or less
0,5-3,5 l/min
0.4 to 4 L/min
02 to 20 L/min
05 to 50 L/min
1-16 l/min
10 to 100 L/min
2-40 l/min
3 LPM up to 20 LPM
5-130 l/min
Accuracy
± 2 % F.S.
±1%
±1% of Flow Reading
±1,5% F.S.
±2%
±2% of R.D
±3% F.S.
down to 10% of Full Scale
Temperatur
0° – 356°F (10° – 60°C)
5-85°C
50°- 140°F (10°- 60°C)
Normal temperature (±0.5°C)
Pressure
0 – 70 psig
0-70 psig
Fluid: 0 to 0.5 MPa
Max. 450kPa at 25°C
Max. 600kPa at 25°C
Tube size
1"
1" x 7/8"
1”
1.32"
1/2"
1/2" x 3/8"
1/2”
1/4"
1/4” (4 mm) up to 1/2” (10 mm)
3/4"
3/4" x 5/8"
3/4”
3/8"
3/8" x 1/4"
3/8”
48.5 mm
61 mm
Flow measurement
400 L/min
Purified water
Ultrapure water
Up to 400 L/min
and other liquids
chemicals
etc. (fluid that does not contain bubbles)
low-K material
photoresist
thinner

Flow Meters

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wetprocess
EsPRO Non-Invasive Ultrasonic Clamp-On Flow Sensor
ESPRO-14.65
Flow Meters
ESPRO
EsPRO Non-Invasive Ultrasonic Clamp-On Flow Sensor
Highly precise ultrasonic clamp-on flow sensor. Innovative contact-free architecture to eliminate risk of contamination and leakage. USA ONLY!
Up to 400 L/min
8 mm
1/4
View product
8 Sizes:
EsPRO Non-Invasive Ultrasonic Clamp-On Flow Sensor 14.65/080PI-V2.0EsPRO Non-Invasive Ultrasonic Clamp-On Flow Sensor 14.65/120PI-V2.0EsPRO Non-Invasive Ultrasonic Clamp-On Flow Sensor 14.65/160PI V2.0
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wetprocess
Espro Vortex Flow Meter
Espro-flowmeter
Flow Meters
ESPRO
Espro Vortex Flow Meter
Flow range: 0,5-3,5 l/min
With Display
5-85°C
View product
4 Sizes:
Espro Vortex Flow Meter 0,5-3,5 l/min (with Display)Espro Vortex Flow Meter 1.0-16 l/min (with Display)Espro Vortex Flow Meter 2.0-40 l/min (with Display)
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wetprocess
Clamp-on ultrasonic flowmeter
GST/SFC011GS
Flow Meters
Tokyo Keiso CO., LTD.
Clamp-on ultrasonic flowmeter
±0.016 L/min for 0.8 L/min or less
±2% of R.D
Normal temperature (±0.5°C)
Fluid: 0 to 0.5 MPa
Purified water, photoresist, low-K material, thinner, etc. (fluid that does not contain bubbles)
View product
wetprocess
High-Purity Inline Ultrasonic Flow Meter
M-2300 (wet)
Flow Meters
MALEMA
High-Purity Inline Ultrasonic Flow Meter
High-Purity Inline Straight Tube Ultrasonic Flow Meter for wet and CMP processes. Delivers precision flow measurement for demanding semiconductor applications
±1%
50°- 140°F (10°- 60°C)
0-70 psig
View product
Wetprocess
M-2700 Series Integrated Ultrasonic Flow Meters
M-2700
Flow Meters
MALEMA
M-2700 Series Integrated Ultrasonic Flow Meters
3 LPM up to 20 LPM
±1% of Flow Reading, down to 10% of Full Scale
0° – 356°F (10° – 60°C)
0 – 70 psig
1/4” (4 mm) up to 1/2” (10 mm)
View product
Wetprocess
VF-2000 Series Vortex Flow Meters
VF-2000
Flow Meters
MALEMA
VF-2000 Series Vortex Flow Meters
View product
wetprocess
Vortex flow sensor
VF-2200
Flow Meters
Tokyo Keiso CO., LTD.
Vortex flow sensor
View product
Wetprocess
VF-3000 Series Vortex Flow Meters
VF-3000
Flow Meters
MALEMA
VF-3000 Series Vortex Flow Meters
View product
wetprocess
VF-8100 Series Vortex Flow Meters
VF-8100
Flow Meters
MALEMA
VF-8100 Series Vortex Flow Meters
View product
4 Sizes:
VF-8100 Series Vortex Flow Meters 3/8”VF-8100 Series Vortex Flow Meters 1/2”VF-8100 Series Vortex Flow Meters 3/4”
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