UCUF-02M/SFC-010L-series Ultrasonic Flow Meter
UCUF-02M/SFC-010L-series Ultrasonic Flow Meter
The UCUF-02M/SFC-010L ultrasonic flowmeter is designed for measuring small flow rates of pure water, ultrapure water, and chemical liquids.
The size of the measuring section is φ2.5 mm, which allows the flowmeter to cover small flow rates that are difficult for other UCUF flowmeters to measure.
All wet parts are made of special-grade PFA molds for the semiconductor industry and have no moving parts or sealing mechanism which would accumulate liquid components.
The simple and smooth construction leaves no residues and is ideal for processes such as semiconductor manufacturing, which requires ultimate cleanliness.
The inlet and outlet of the flowmeter are formed by standardized tubes, so the flowmeter can connect to various PFA fittings.
Features
- Small size: The UCUF-02M/SFC-010L can measure ultrasonic propagation through liquids in the φ2.5 tubing, which is difficult for other flowmeters to measure.
- Low flow measurement: 0 to 10 mL/min
- EMC compliance: EN61326-1
- RoHS compatible
- Liquids with kinematic viscosity of as high as 40 mm²/s can be measured.
- Detector with highly clean construction
- Corrosion-resistant and easy to install
- Accuracy: Within ±1% of the reading at a flow rate of 25 mL/min or more
Applications
- Pure water and ultrapure water in the semiconductor manufacturing process
- Chemical feeding
- Highly corrosive chemicals
- Chemical mechanical polishing (CMP) slurries
- Process liquids of small flow rate
- Ideal for flow measurement and control of cleaning and CMP processes
| Measuring medium | Liquids (those that do not contain air bubbles and permeate or corrode PFA) |
| Nominal diameter | 1/4" |
| Flow range | Min. 0 to 10 mL/min Max. 0 to 100 mL/min Full scale setting in 10 mL/min steps |
| Fluid temperature | 10 to 90 °C |
| Fluid pressure | 0 to 0.5 Mpa |
| Process Connection | PFA tube end |
| Accuracy | ±1% RD (at a flow rate of 25 mL/min or more) ±0.25 mL/min (at a flow rate of up to 25 mL/min) For water of 20℃ |
Compatible converter
| Model | SFC-010L |
| Display | 4-digit LED, Instantaneous flow rate (mL/min) |
| Output | 1) Current: 4 to 20 mA DC (Load resistance: within 500 Ω) 2) Frequency: Open collector pulse Load rating: 30 V DC, 10 mA 0 to 1000 Hz 3) Alarm: Open collector, 2 points Load rating: 30 V DC, 10 mA |
| Power supply / consumption | 24 V DC± 10% |
| Construction | IP20 (indoor use) |
| Installation | DIN rail installation |
