UCM-04A/06A-series Ultrasonic Flow Meter
UCM-04A/06A-series Ultrasonic Flow Meter
The UCM-04A/06A is the converter integrated type ultrasonic flowmeter for small flow that offers precise and stable flow measurement for ultra-pure water and chemicals. A compact body with a detector and converter saves installation space. The 7-segment LEDs and clear bar graph indication on the front panel allow easy reading in the field.
The wetted parts consist of the molded PFA specified for semiconductor industries. The simple and clean construction without any moving parts and without sealing pockets where liquids stagnate, makes the UCM-04A/06A an ideal choice for the clean process, such as the semiconductor plant.
The flowmeter has the inlet and outlet tubes of standard dimensions suitable for various PFA fittings. In the services where only a flow monitor has been simply used so far, the UCM-04A/06A can be applied without difficulties.
Features
- Integration of detector and converter makes the piping and wiring simple.
- One consolidated body saves installation space.
- 7-segment LEDs and bar graph on the front panel make reading easy even at a dark place.
- The dedicated software makes parameter setting like alarms easier than ever.
- The meter contains ideal and clean detector.
- The hall element makes zero adjustment surely.
- The RS-485 makes parameter setting easy.
- RoHS compliance
Applications
- Pure water and ultra-pure water services in semiconductor manufacturing plants
- Chemical feedings
- Corrosive chemicals
- Suitable for very low and low flow rate services such as cleaning equipments
| Model | UCM-04A | UCM-06A |
| Measuring medium | Liquids (Without bubbles, and homogeneously mixed) | |
| Nominal diameter | φ6.35 x φ4.35 tube | φ9.53 x φ6.35 tube |
| Flow range | Min.: 0 to 0.2 L/min Max.: 0 to 3.0 L/min |
Min.: 0 to 1.0 L/min Max.: 0 to 8.0 L/min |
| Fluid temperature | 10 to 60°C | |
| Fluid pressure | 0 to 0.4 MPa | |
| Process Connection | PFA tube ends | |
| Accuracy | ±1% F.S. (±8 mL/min for flow range 0 to 500 mL/min or less) |
±1% F.S. (±17 mL/min for flow range 0 to 1000 mL/min or less) |

