SPIN200x Advanced - Spin coater POLOS® NPP

POLOS 200 Advanced Single Substrate Spin Processor, Desktop version, automatic chemical dispense, heavy duty motor. It supports a large variety of fluids thanks to the full plastic housing available in natural polypropylene as well PTFE. The control of the motor mode rotation, in combination with the up to 6 automatic dispensers in the POLOS Advanced systems, enables a uniform deposition of multilayer thin films and photo resist development. These features enable a quick process optimization with fully automatic recipes and high reproducibility.

Suitable for Coating, Cleaning, Rinse/Dry, Developing, Etching, PDMI, and other processes

Specifications:

• Up to 260 mm round or 6” x 6” square substrates
• Material: Natural Polypropylene (High grade NPP, tool body and all wetted surfaces)
• Transparent Lid with syringe holder for central dispensing
• CW & CCW Puddle Rotation
• (Detachable) Colour Touchscreen with Customisable Icons
• Glove friendly, IP52, chemical resistant
• Unlimited Program Storage for recipes with multiple steps each
• USB Port
• Standard 1" Drain Connection
• Compatible with our sapphire MegPie megasonic transducer
• We also offer optional backside Rinse and Pneumatic Lids, vacuum pumps, dispence vessels and a Jet Spray injector for this series!

Including:

• 3 Programmable Dry Relays, nominal switching capacity 0.5A / 125 VAC - 0.3A / 60DC
• 1 Piece Vacuum Chuck A-V87-S96-NPP for substrates up to Ø 100 mm up to Ø200 mm and 
• 1 piece Fragment Adapter D-V10-S50-NPP

For more information visit:
www.sps-polos.com