Photolithography

Products for safe storage and handling of reticles,
as well as mask aligners and uv meters.

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Wafer size
Ø300 mm or 8" x 8" square substrates
Ø450 mm or 10" x 10" square substrates and bigger
Substrate size
Material: Steel housing
Type
Automated Series

SPIN4000A-5000A

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Photolithography
POLOS SPIN4000A Spin Coating System
POLOS-SPIN4000A
SPIN4000A-5000A
POLOS
POLOS SPIN4000A Spin Coating System
Ø300 mm or 8" x 8" square substrates
Material: Steel housing
Automated Series
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Photolithography
POLOS SPIN4000A Auto Dispense-Cleaning Configuration
POLOS-SPIN4000A-CL
SPIN4000A-5000A
POLOS
POLOS SPIN4000A Auto Dispense-Cleaning Configuration
Ø300 mm or 8" x 8" square substrates
Material: Steel housing
Automated Series
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Photolithography
POLOS SPIN5000A Spin Coater System
POLOS-SPIN5000A
SPIN4000A-5000A
POLOS
POLOS SPIN5000A Spin Coater System
Ø450 mm or 10" x 10" square substrates and bigger
Material: Steel housing
Automated Series
View product