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Wafer size
Max. spray area: 150 mm x 150 mm
Max. spray area: 300 mm x 300 mm
Max. spray area: 600 mm x 600 mm
Substrate size
Spray width: < 100mm
Spray width: 1 mm to 100 mm
Type
Benchtop model
Stand-Alone System

Spray Coating

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Photolithography
POLOS-UC320
Spray Coating
POLOS
POLOS UC320 Benchtop Ultrasonic Spray Coating System
Max. spray area: 150 mm x 150 mm
Spray width: 1 mm to 100 mm
Benchtop model
Photolithography
POLOS-UC330
Spray Coating
POLOS
POLOS UC330 Benchtop Ultrasonic Spray Coating System
This all-new POLOS® Ultrasonic Spray Coating System is used for high-precision coating in R&D and small volume production.
Max. spray area: 300 mm x 300 mm
Spray width: 1 mm to 100 mm
Benchtop model
photolithography
POLOS-UC360c
Spray Coating
POLOS
POLOS UC360c Ultrasonic Spray Coating System
Allows highly precision nano-particle coating with more efficient photoresist consumption compared to standard photoresist application techniques.
Max. spray area: 600 mm x 600 mm
Spray width: < 100mm
Stand-Alone System