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(3)Options POLOS
(13)Chuck
(11)Chuck Adapter
(5)Chuck Foil
(2)Wafer size
Max. spray area: 150 mm x 150 mm
Max. spray area: 300 mm x 300 mm
Max. spray area: 600 mm x 600 mm
Substrate size
Spray width: < 100mm
Spray width: 1 mm to 100 mm
Type
Benchtop model
Stand-Alone System
Spray Coating
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Refine
Category
SPIN150x-200x
(5)SPIN200x Advanced
(1)SPIN300x Advanced
(1)POLOS-450
(1)Spray Coating
(3)SPIN4000A-5000A
(3)Options POLOS
(13)Chuck
(11)Chuck Adapter
(5)Chuck Foil
(2)Wafer size
Max. spray area: 150 mm x 150 mm
Max. spray area: 300 mm x 300 mm
Max. spray area: 600 mm x 600 mm
Substrate size
Spray width: < 100mm
Spray width: 1 mm to 100 mm
Type
Benchtop model
Stand-Alone System
Apply filters
Photolithography
POLOS-UC320
Spray Coating
POLOS
Max. spray area: 150 mm x 150 mm
Spray width: 1 mm to 100 mm
Benchtop model
Photolithography
POLOS-UC330
Spray Coating
POLOS
This all-new POLOS® Ultrasonic Spray Coating System is used for high-precision coating in R&D and small volume production.
Max. spray area: 300 mm x 300 mm
Spray width: 1 mm to 100 mm
Benchtop model
photolithography
POLOS-UC360c
Spray Coating
POLOS
Allows highly precision nano-particle coating with more efficient photoresist consumption compared to standard photoresist application techniques.
Max. spray area: 600 mm x 600 mm
Spray width: < 100mm
Stand-Alone System