Documentation

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SPS-Europe Photolithography Brochure 2021

SPS-Europe Product Review of all Products 2018

SPS-Europe Product Highlights

University brochure | SPS-Europe works closely with international R&D institutes and universities in finding technical solutions. Our affordable spin coater, mask aligners, and thin film equipment enable transferring processes from lab-scale to pilot scale to production scale.

CMP brochure | CMP process supporting products, including Slurry Mixing Systems, a variety of Chemical Pumps, Retaining Rings and other CMP consumables. When coupled with our post-CMP cleaning products, our solutions provide leading-edge cleaning performance.

SPS-Europe brochure SPS-Asia technology

MEMS brochure | For MEMS we offer a complete range of systems and tools for deposition, photolithography, wet etching and handling.

300mm Brochure | A full range of components and tools to enhance yield for the production of cost-effective products for 300 mm production

Spincoating spin coaters | Our spin coater models have proven themselves over the years for spincoating a wide range of substrates: from small fragments up to Ã¯Â¿Â½450 mm. We offer special spin coaters or spin processors for large glass panels (e.g. LCD/LED ) up to 900 mm square! www.spincoating.com

Manufacturing & Handling Products | Extend the life-time of your process equipment? Upgrade your existing SAT, SST or CMP tool? Safe handling (& storage) of thin wafers?