SafeGuard wafer transfer (WHS-T1) 300 mm (12")

The WHS-T1-1201 is a compact, tabletop 300mm wafer transfer station engineered to provide safe, efficient movement of high-value silicon wafers between SEMI-standard FOUPs, FOSBs, and open 300mm metal cassettes. Built for high-precision semiconductor operations, the system is optimized for cleanroom use, operator safety, and ease of integration into existing manual workflows.

Designed to be placed on a standard cleanroom table, the WHS-T1-1201 meets SEMI S8 ergonomic load height standards. The integrated motorized rotating stage aligns the FOUP/FOSB to the correct orientation for door removal using a manual opener tool such as the WHS-O5-FOUP. Once the door is removed, the stage automatically repositions to allow seamless access for the wafer transfer process.

At the heart of the system is a dual carbon fiber transfer arm equipped with 25-position antistatic rods, which gently engage only the backside of each wafer—eliminating slide contact and minimizing stress during handling. The tool is capable of transferring a full FOUP or FOSB (25 wafers) in under one minute with high repeatability and low risk of particle generation.

The SafeGuard interface features a touchscreen control panel and a light tower system, providing real-time feedback and system status during operation. Multiple safety sensors are embedded throughout the tool to detect misalignment, improper cassette placement, or operator intrusion—protecting both the wafers and the user at all times.

Key Features:

• Designed specifically for 300mm Si wafers in FOUPs, FOSBs, and metal cassettes (aluminum or stainless steel)
• Antistatic carbon fiber transfer rods minimize wafer backside contact
• Motorized rotating stage supports manual door removal with tools like WHS-O5-FOUP
• 25-wafer transfer completed in under 1 minute
• Touchscreen and light tower interface for user-friendly operation and process visibility
• Multiple integrated safety sensors protect wafers and personnel
• Ergonomic SEMI S8-compliant load height
• Compatible with SEMI-standard FOUPs, FOSBs, and cassettes
• ISO 3 (FS209E Class 1) cleanroom compatible
• Manufactured in an ISO9001 certified facility, CE certified

The WHS-T1-1201 is the ideal tool for wafer transfer applications where precision, safety, and throughput are essential—bridging the gap between manual loading and full automation with unmatched flexibility and reliability.