Wafer handling products
Automatic slide transfer (WHS-T2) 150 mm (6”)
Wafer handling products
Automatic slide transfer (WHS-T2) 150 mm (6”)
Choose your size:
Antistatic Construction With Wafer and Cassette Ground Paths
Touch Screen Display Controls
Programmable Transfer arm Resistance Sensor
Integrated Cassette-in-place Sensors
Applications
- Shipping/receiving area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.
- Epitaxial area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production or specialty EPI process cassette.
- Wet chemistry areas: Wafer transfers are used to move wafers between a WIP production cassette to a wet process Teflon PFA cassette when they enter wet chemistry areas.
- Thermal process bake areas: Wafer transfers are used to move wafers between a WIP production cassette and metal or quartz cassettes when they enter thermal process bake process areas
- Metrology and inspection areas: Wafer transfers may also occur in metrology and inspection areas where wafers are analyzed and inspected for defects and other quality control measures.
- Probe and test areas: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.
Material Stage: Anti-Static/Natural Polypropylene
Material Arm: ESD-Safe Polyoxymethylene
Type: Automatic System
Slots: 25 Slots
Precision automatic horizontal bulk wafer slide transfer for safely transferring 150 mm wafers between two SEMI compliant wafer cassettes. Compatible with high- and low-profile plastic process, metal cassettes and 200mm shipping cassettes. Features a touchscreen display, integrated SEND and RECEIVE stage cassette-in-place sensors and an adjustable transfer arm resistance sensor which monitors for excessive forces during motion. Antistatic and chemical resistant materials. ISO Class 4.
Brand
Wafer handling products
Product Number
WHS-T2-601
Remarks
*** NOTE: Please specify cassette model number(s) when ordering ***
Material
Anti-static/natural polypropylene
Wafer size
150 mm (6”)
System
Automatic system
Slots
Up to 25
Material arm
ESD-safe polyoxymethylene
Cleanroom designation
ISO 4
Status
Request information
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