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Material
Anti-static PEEK
Wafer size
100 mm (4”)
150 mm (6”)
200 mm (8”)
76 mm (3”)
System
Automatic system
Slots
Up to 25
Material rods
Carbon fiber
Cleanroom designation
ISO 3

SafeGuard Thin/Compound

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WHS-T1
SafeGuard Thin/Compound
WHS
SafeGuard wafer transfer (WHS-T1)
The T1 Series LCT2 is advanced technology automatic SafeGuard bulk wafer transfer for 76 mm up to 200 mm wafers.
76 mm (3”), 100 mm (4”), 150 mm (6”) or 200 mm (8”)
Automatic System
4 Sizes:
SafeGuard wafer transfer (WHS-T1) 76 mm (3”)SafeGuard wafer transfer (WHS-T1) 100 mm (4”)SafeGuard wafer transfer (WHS-T1) 150 mm (6”)More...