Manual wafer transfer (WHS-T3) 150 mm (6”)

WHS-T3 Manual Slide Transfer System

Applications

• Shipping/receiving area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.
• Epitaxial area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production or specialty EPI process cassette.
• Wet chemistry areas: Wafer transfers are used to move wafers between a WIP production cassette to a wet process Teflon PFA cassette when they enter wet chemistry areas.
• Thermal process bake areas: Wafer transfers are used to move wafers between a WIP production cassette and metal or quartz cassettes when they enter thermal process bake process areas
• Metrology and inspection areas: Wafer transfers may also occur in metrology and inspection areas where wafers are analyzed and inspected for defects and other quality control measures.
• Probe and test areas: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.
• Wafer Flipping/Inverting: Wafer transfers are used to move wafers from one cassette to another that has been inverted 180°. In semiconductor manufacturing, there are various processes that involve working on the backside of a wafer. These processes can include backside lithography, etching, deposition, and bonding, among others. To carry out these processes, the manufacturer needs to flip the wafer over so that the backside is facing up.

The WHS-T3 series is a precision manual horizontal bulk wafer slide transfer system designed to safely move wafers between two SEMI-compliant cassettes.

Available in standard models for 150 mm wafers, the WHS-T3 is compatible with high- and low-profile plastic process cassettes, metal cassettes, and most shipping cassettes with an H-BAR. This system ensures smooth and efficient wafer transfers in semiconductor manufacturing environments, including shipping/receiving, epitaxial, wet chemistry, and thermal processing areas.

The WHS-T3 features a maintenance-free, precision slide rail system built with advanced coated rods and UHMW bearing blocks, providing reliable, smooth operation. Constructed from antistatic, abrasion-resistant, and chemical-resistant materials, the WHS-T3 is ISO 4 (FS209E Class 10) cleanroom compatible, ensuring optimal wafer protection during handling and transfer processes.

For more specialized wafer handling, the WHS-T3 offers optional models for wafer flipping and inverting, available for 150mm and 200mm wafers. These models are designed with a custom stage to accommodate cassettes in both standard H-bar-down or inverted H-bar-up orientations, allowing for precise wafer inversion during transfer.

Manufactured in an ISO9001 certified facility and CE certified, the WHS-T3 series offers a robust, reliable solution for manual wafer transfers, ensuring wafer safety and handling precision across various semiconductor manufacturing processes.