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Wafer Transfers

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wafer-handling
Vertical Wafer Transfer - Single/Mass
SWTS-Serie
Vertical Wafer Transfer
TBP
Vertical Wafer Transfer - Single/Mass
5" (125mm)
Automatic System
Single & Mass Transfer
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4 Sizes:
Vertical Wafer Transfer - Single/Mass 4" (100mm)Vertical Wafer Transfer - Single/Mass 5" (125mm)Vertical Wafer Transfer - Single/Mass 6" (150mm)
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wafer-handling
SafeGuard wafer transfer (WHS-T1)
WHS-T1
SafeGuard Thin/Compound
Wafer handling products
SafeGuard wafer transfer (WHS-T1)
The T1 Series LCT2 is advanced technology automatic SafeGuard bulk wafer transfer for 76 mm up to 200 mm wafers.
76 mm (3”), 100 mm (4”), 150 mm (6”) or 200 mm (8”)
Automatic System
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4 Sizes:
SafeGuard wafer transfer (WHS-T1) 76 mm (3”)SafeGuard wafer transfer (WHS-T1) 100 mm (4”)SafeGuard wafer transfer (WHS-T1) 150 mm (6”)
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wafer-handling
Automatic slide transfer (WHS-T2)
WHS-T2
Automatic Slide Transfer
Wafer handling products
Automatic slide transfer (WHS-T2)
The T2 Series LCT1AS12 is a precision automatic horizontal bulk wafer slide transfer for safely transferring 76 mm up to 200 mm wafers between two SEMI complian
76 mm (3”), 100 mm (4”), 150 mm (6”) or 200 mm (8”)
Automatic System
Wafers For 25-Slot Cassettes
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4 Sizes:
Automatic slide transfer (WHS-T2) 76 mm (3”)Automatic slide transfer (WHS-T2) 100 mm (4”)Automatic slide transfer (WHS-T2) 150 mm (6”)
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wafer-handling
Manual wafer transfer (WHS-T3)
WHS-T3
Manual Slide Transfer
Wafer handling products
Manual wafer transfer (WHS-T3)
The T3 Series is a precision manual horizontal bulk wafer slide transfer for safely transferring wafers between two SEMI compliant 76 mm up to 200 mm wafers
76 mm (3”), 100 mm (4”), 150 mm (6”) or 200 mm (8”)
Automatic System
Wafers For 25-Slot Cassettes
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4 Sizes:
Manual wafer transfer (WHS-T3) 76 mm (3”)Manual wafer transfer (WHS-T3) 100 mm (4”)Manual wafer transfer (WHS-T3) 150 mm (6”)
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wafer-handling
Vertical Wafer Transfer - Automatic
WTM-Serie
Vertical Wafer Transfer
TBP
Vertical Wafer Transfer - Automatic
4" (100mm)
Automatic System
Optional Alignment
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4 Sizes:
Vertical Wafer Transfer - Automatic 4" (100mm)Vertical Wafer Transfer - Automatic 5" (125mm)Vertical Wafer Transfer - Automatic 6" (150mm)
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