Automatic slide transfer (WHS-T2) 100 mm (4”)

Applications

• Shipping/receiving area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.
• Epitaxial area: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production or specialty EPI process cassette.
• Wet chemistry areas: Wafer transfers are used to move wafers between a WIP production cassette to a wet process Teflon PFA cassette when they enter wet chemistry areas.
• Thermal process bake areas: Wafer transfers are used to move wafers between a WIP production cassette and metal or quartz cassettes when they enter thermal process bake process areas
• Metrology and inspection areas: Wafer transfers may also occur in metrology and inspection areas where wafers are analyzed and inspected for defects and other quality control measures.
• Probe and test areas: Wafer transfers are used to move incoming wafers from a shipping cassette to a WIP production cassette.
   

Material Stage: Anti-Static/Natural Polypropylene
Material Arm: ESD-Safe Polyoxymethylene

The WHS-T2 series is a precision-engineered, automatic horizontal bulk wafer slide transfer system designed for safely moving wafers between two SEMI-compliant cassettes. Available for for 100 mm, wafers, the WHS-T2 is compatible with high- and low-profile plastic process cassettes, metal cassettes, and most shipping cassettes with an H-BAR. This advanced system ensures smooth and efficient wafer transfers across various semiconductor applications, including shipping/receiving, epitaxial, wet chemistry, and thermal processing areas.

The WHS-T2 comes equipped with a touchscreen display for intuitive control, integrated SEND and RECEIVE stage cassette-in-place sensors, and an adjustable transfer arm resistance sensor to detect excessive forces during motion—safeguarding wafer integrity.

Additionally, an ultrasonic sensor provides an extra safety check by detecting if wafers are already present in the RECEIVE cassette when the operator initiates a transfer, further preventing potential errors or wafer damage.

Constructed from antistatic, chemical-resistant materials, the WHS-T2 guarantees a clean, controlled environment, meeting ISO 4 (FS209E Class 10) cleanroom standards. Its versatility makes it suitable for wafer handling in metrology, etch, inspection, probe, and test areas.

Manufactured in an ISO9001 certified facility and CE certified, the WHS-T2 offers a robust, reliable solution for precision wafer transfers in semiconductor manufacturing environments.