Wafer handling products

SafeGuard wafer transfer (WHS-T1) 150 mm (6”)

Wafer handling products

SafeGuard wafer transfer (WHS-T1) 150 mm (6”)

Choose your size:
Precision robotic control for 76mm to 200mm wafers
Gentle handling of thin, warped, and high-value wafers
 Compact, low-maintenance, ISO 3 (Class 1) design
Programmable touchscreen with adjustable settings

Other products of interest

wafer-handling
WHS-T2-601
Automatic Slide Transfer
Wafer handling products
Automatic slide transfer (WHS-T2) 150 mm (6”)
The T2 Series LCT1AS12 is a precision automatic horizontal bulk wafer slide transfer for safely transferring 150 mm wafers between two SEMI compliant wafer cass
150 mm (6”)
Automatic system
Up to 25
Antistatic Polyoxymethylene
ISO 4
wafer-handling
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Manual wafer transfer (WHS-T3) 150 mm (6”)
The T3 series 150 mm (6") is a precision manual horizontal bulk wafer slide transfer for safely transferring wafers between two SEMI compliant wafer casset
150 mm (6”)
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Up to 25
ESD-safe polyoxymethylene
ISO 4
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WHS-M1-1807774
Aluminum cassettes
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PROCESS ALUMINUM CASSETTE, (AL, HC) 6" - 25 SLOT, SLOT-SHAPE ANGULAR COVER-PLATE (TOP), H-BAR (BOTTOM)
The WHS-M1 Series MCF is an all aluminum 150 mm (6") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
150 mm (6”)
T6061 aluminum alloy
(HC) hard clear anodization
350° C
ISO 3 (Class 1 FS209E)
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Stainless steel cassettes
Wafer handling products
Stainless Steel Cassette 150 mm (6”)
150 mm (6”)
316 stainless steel
(EP) electro-polished
550° C
ISO 3 (Class 1 FS209E)