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Edge Polish System
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Edge Polish System
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Wafer size
2" - 8"
6"
8" and 12"
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Edge Polish System
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Edge Polish System
(3)
Wafer size
2" - 8"
6"
8" and 12"
Weight
1500 kg
2000 kg
2500
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polishing
Wafer Edge Polisher
HT-Series
Edge Polish System
MIPOX
8" and 12"
2500
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polishing
Silicon Wafer Edge Polisher System
NME-Series
Edge Polish System
MIPOX
6", 8" and 12"
2000 kg
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polishing
GaAs/SiC Wafer Edge Polisher System
SFF-series
Edge Polish System
MIPOX
2" - 8"
1500 kg
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