MIPOX
Silicon Wafer Edge Polisher System
MIPOX
Silicon Wafer Edge Polisher System
Silicon Wafer Edge Polisher System
Increase throughput and improve surface precision in the wafer manufacturing process, our silicon wafer edge polisher is now found all over the world. This edge polisher, compatible with 6, 8, or 12 inch wafers, uses polishing tape with a fixed-abrasive; the tape is made by our own special manufacturing method and can be fed through the machine during polishing, making it possible to constantly polish with a new abrasive surface and also give a consistent polishing capability.
Advantages:
- High throughput for any type of wafer
- Improves surface precision
- Chemical free polishing
- Removes various types of films
- Can be introduced at any stage of the wafer manufacturing process
Brand
MIPOX
Product Number
NME 123N
Width
2000
Height
2250
Depth
2200
Wafer size
12 inch
Weight
± 3200 kg
Wafer thickness
775± 60 μm
Air pressure
0.5-0.8 MPa
Water pressure
0.2-0.4 MPa
Exhaust ventilation
Exhaust amount 300 m3 /hour
Status
Request information