Wafer Handling Systems WHS‑A wafer aligner series ensures precise wafer orientation and enables critical wafer inspection tasks with pinpoint accuracy. Designed as advanced wafer alignment tools for bulk, flat (flatfinder capability), and notch alignment, these systems maintain lot integrity and support reliable wafer edge inspection—all within strict cleanroom specifications.
WHS‑A wafer aligners precisely control wafer orientation, rotating each wafer to expose scribe‑mark ID information on the edge, allowing operators to confirm the correct lot before downstream processes. This built‑in verification step helps prevent costly mix‑ups.
During critical semiconductor processes like lithography, deposition, and etch, exact wafer orientation (including silicon wafer orientation) is crucial.
Integrated lighting and magnification features facilitate detailed wafer inspection of rims for chips, cracks, or foreign particles. Catching defects at this stage with the wafer aligner prevents setbacks later in the fab. This capability approaches the utility of a dedicated wafer inspection machine for identifying edge defects early.
The A2 and A4 series offer manual wafer aligner solutions, including options functioning as a dedicated wafer flat aligner or wafer notch aligner, complete with ESD‑safe materials. Our A6 tabletop wafer aligner delivers economical performance for 76 mm, 100 mm, and 150 mm wafers without sacrificing accuracy.
