Manual flat aligner (WHS-A2)
Manual flat aligner (WHS-A2)
WHS-A2 Manual Wafer Flat Aligner
The WHS-A2 series is a manual wafer flat aligner designed for top and bottom bulk alignment of wafers ranging from 76 mm (3”) to 150 mm (6”). It is engineered to handle compound wafers such as InP, GaAs, GaN, and SiC, ensuring accurate alignment for critical semiconductor processes, including lithography, deposition, and etching.
With its ergonomic spin-knob and lever, the WHS-A2 reduces operator fatigue while maintaining precise control over alignment. The spring-loaded stage gently engages wafers, protecting edges, enhancing yield, and reducing breakage risks.
Built with static dissipative materials, the WHS-A2 provides ESD protection by grounding both the wafer and cassette, safeguarding sensitive devices. Designed to operate in ISO 4 (Class 10 FS209E) cleanroom environments, it meets stringent contamination control requirements.
The WHS-A2 is compatible with SEMI-compliant wafer cassettes and features a quick-disconnect roller assembly for easy maintenance. It supports important tasks like lot integrity checks and edge inspection, helping operators detect defects early and prevent costly delays.
Manufactured in an ISO9001 certified facility, the WHS-A2 is CE certified, ensuring compliance with rigorous international quality and safety standards. This makes it an ideal choice for precise wafer handling in cleanroom applications.