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Metal Cassettes

WHS Metal Cassettes: Advanced Wafer Cassette Solutions

Enter a new era of wafer handling with WHS Wafer Handling Systems. Our advanced metal cassette portfolio a leading range of wafer cassette solutions—offers precise, durableoptions tailored to semiconductor production. These versatile wafer carriers, sometimes referred to as a wafer holder, provide precise handling. Whether used as process wafer cassettes in thermal processing or high-volume automation, our products are engineered to handle every wafer with care.

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WHS-M1 aluminum cassettes
WHS-M2 legacy cassettes
WHS-M3 stainless steel cassettes
WHS-M4 300 mm cassettes
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WHS-M1 Precision Thermal Processing

The WHS-M1 series, premier aluminum wafer cassettes, features high-grade construction. As a high-performance high temperature wafer carrier, it supports thermal processes up to 350°C. Options such as dual h-bar structures and electroless nickel plating ensure compatibility. Designed for flexibility, this wafer cassette sets a high bar for performance in heat-intensive environments.

  • Handles high-temperature processing up to 350°C 
  • Available in 76 mm, 100 mm, 150 mm, and 200 mm sizes 
  • Hard anodized aluminum for durability in ISO 3 cleanrooms
  • Custom options: nickel plating, double H-bar, and slot profiles 
  • Short lead times, economical pricing, and low MOQ for custom orders

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WHS-M2 – Upgraded Legacy Metal Cassette Compatibility

Retaining familiar features while integrating modern engineering, the WHS-M2 brings legacy metal cassette formats into the future, functioning as a reliable wafer cassette upgrade. Its tongue-and-groove design enhances stability and ease of use, while maintaining compatibility with existing OEM systems. It's a perfect solution for upgrading your wafer carrier systems without disruption.

  • 25-slot aluminum cassette for processing up to 250°C 
  • PTFE stops for gentle wafer edge contact 
  • Available in 76 mm, 100 mm, 150 mm, and 200 mm sizes 
  • Hard anodized for abrasion resistance in ISO 3 cleanrooms 
  • Custom options: nickel plating, 13-slot designs, and slot profiles
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WHS-M3 – Stainless Steel Wafer Cassette Built for Extreme Heat

Crafted from durable stainless steel, the WHS-M3 stainless steel wafer cassette series is made to withstand the toughest thermal processes. Functioning as an extreme high temperature wafer carrier, it endures up to 550°C. Engineered for robustness in automated systems, this metal cassette provides outstanding reliability, making it a trusted choice for high-heat manufacturing.

  • Handles high-temperature processing up to 550°C 
  • Maintains dimensional stability for long-term automation use 
  • Electro-polished 316 stainless steel for corrosion resistance 
  • Available in 76 mm, 100 mm, 150 mm, and 200 mm sizes 
  • Ideal for baking, ultrasonic cleaning, and thin/thick wafer handling

WHS-M4 – Advanced 300 mm Wafer Cassette Handling

Precision-built as a 300 mm wafer cassette, the WHS-M4 is available as both aluminum wafer cassettes and stainless steel wafer cassette variants. Their SEMI-standard design ensures both compliance and comfort. Designed as a secure wafer carrier for streamlined operation, the WHS-M4 metal cassette is ideal for high-volume fabs using 300 mm wafers.

  • Lightweight aluminum cassette for 300 mm wafers 
  • SEMI compliant, fits all 300 mm load ports 
  • HC or EN surface finish options available 
  • Locking latch bar prevents wafer slippage 
  • SEMI S8 ergonomic handles for secure handling
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Your Partner in Precision Wafer Holders

At Wafer Handling Systems, we’re more than a supplier—we’re your partner in reliable semiconductor manufacturing. Our WHS-M metal cassette lineup, encompassing versatile wafer cassette and wafer carrier designs, is engineered for exacting results. Elevate your wafer handling operations with a superior wafer holder solution built for the future.