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Material
Aluminum (coated) - Finish Hard Clear Anodized (HC)
Wafer sizes
(3”) 76 mm
(4”) 100 mm
(6”) 150 mm
(8”) 200 mm
Material
T6061 aluminum alloy
Surface finish
(HC) hard clear anodization
Material, wafer stops
PTFE Teflon®
Max temperature
250° C
Cleanliness
ISO 3 (Class 1 FS209E)

Legacy cassettes

The WHS-M2 series is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C.

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process-cassettes
Legacy cassette, aluminum (coated), 25 slot, slot-shape angular
WHS-M2
Legacy cassettes
Wafer handling products
Legacy cassette, aluminum (coated), 25 slot, slot-shape angular
The M2 series AMC is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C.
76 mm (3”), 100 mm (4”), 150 mm (6”) or 200 mm (8”)
Angular
25-slots
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4 Sizes:
Legacy cassette, aluminum (coated), 25 slot, slot-shape angular 76 mm (3”)Legacy cassette, aluminum (coated), 25 slot, slot-shape angular 100 mm (4”)Legacy cassette, aluminum (coated), 25 slot, slot-shape angular 150 mm (6”)
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process-cassettes
Legacy cassette, aluminum (coated) Top Plate, 25 slot, slot-shape angular
WHS-M2-TP
Legacy cassettes
Wafer handling products
Legacy cassette, aluminum (coated) Top Plate, 25 slot, slot-shape angular
The M2 series AMC is an all aluminum 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 250° C.
View product
4 Sizes:
Legacy cassette, aluminum (coated) Top Plate, 25 slot, slot-shape angular 76 mm (3”)Legacy cassette, aluminum (coated) Top Plate, 25 slot, slot-shape angular 100 mm (4”)Legacy cassette, aluminum (coated) Top Plate, 25 slot, slot-shape angular 150 mm (6”)
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