
Tokyo Keiso CO., LTD.
From the day of establishment in 1954, Tokyo Keiso Company has continuously made efforts to develop new technologies and has been a world pioneer in continuously creating products to meet changing needs.
CMP

Flow Controllers
WETPROCESS

Flow Controllers

Flow Meters

Purge Meters
The latest Tokyo Keiso CO., LTD. products
wetprocess
GST/SFC011GS
Flow Meters
Tokyo Keiso CO., LTD.
±0.016 L/min for 0.8 L/min or less
±2% of R.D
Normal temperature (±0.5°C)
Fluid: 0 to 0.5 MPa
Purified water, photoresist, low-K material, thinner, etc. (fluid that does not contain bubbles)
wetprocess
VF-2200
Flow Meters
Tokyo Keiso CO., LTD.
cmp
CLFC300 (CMP)
Flow Controllers
Tokyo Keiso CO., LTD.
wetprocess
CLFC300 (Wet)
Flow Controllers
Tokyo Keiso CO., LTD.
wetprocess
purge-meter-P100
Purge Meters
Tokyo Keiso CO., LTD.
wetprocess
purge-meter-P400
Purge Meters
Tokyo Keiso CO., LTD.
wetprocess
purge-meter-P510
Purge Meters
Tokyo Keiso CO., LTD.
wetprocess
purge-meter-P880
Purge Meters
Tokyo Keiso CO., LTD.









