ESPRO

ESPRO

esPRO® is a leading wet process solutions provider in the semiconductor field, offering filters, heaters, pumps, flowmeters, CMP solutions, refurbs and more. As industry leaders, we take pride in sourcing our raw materials exclusively from ultra-high purity suppliers, ensuring the highest quality standards for our products.

Main activities:

  • Filtration products
  • Process cassettes
  • Diaphragm pumps
  • Flow meters
  • Gas filters
  • Immersion heaters
  • Inline heaters
  • Megasonic transducer Array
  • PFA parts
  • Quartz tanks
  • Tank heater
  • SAT & SST tool refurb service

 

CMP

975-filter-capsules-disposables
Filter Capsules / Disposables

The latest ESPRO products

Wetprocess
Espro-NN6/NN66
Filter Cartridges / Non-disposables
ESPRO
NN6/NN66 series Photoresist Filters
NN6/NN66 series photoresist filter cartridges are made of nylon microporous membrane and processed by advanced fusion welding process.
Photoresist
120ºC
0.10 μm
Wetprocess
Espro-CFRS
Filter Capsules / Disposables
ESPRO
CFRS filter for removing metal ions
CFRS capsule filter, for semiconductor industries, effectively removes metal ions and ensures a stable output of ultrapure water.
Water
40ºC
Wetprocess
Espro-CMP-RF
Filter Cartridges / Non-disposables
ESPRO
CMP-RF depth filter
CMP-RF depth filter is rolled with multilayer graded PP membrane. These PP media have a continuously tapered pore structure. Economical for polishing solutions.
CMP
80ºC
0.10 μm
Wetprocess
Espro-CMP-PP
Filter Cartridges / Non-disposables
ESPRO
CMP-PP Pleated Filter Cartridge
The CMP-PP series utilizes multi-layer imported PP membranes as filter media. High contamination holding capacity, all-polypropylene structure
CMP
80ºC
0.10 μm
Wetprocess
Espro-CFCME
Filter Capsules / Disposables
ESPRO
CFCME Capsule Filter
Used in CMP applications, has a compact structure and easy operation. Excellent filtering effect, all polypropylene structure, hot-melt welding, no adhesiv
CMP
55ºC
0.10 μm
cmp
Espro-CFCMP
Filter Capsules / Disposables
ESPRO
CFCMP Capsule Filter
Used in CMP applications, has a compact structure and easy operation. Excellent filtering effect, all polypropylene structure, hot-melt welding, no adhesiv
CMP
55ºC
0.10 μm
cmp
Espro-CFCMC
Filter Capsules / Disposables
ESPRO
CFCMC Capsule Filter
Used in CMP applications, has a compact structure and easy operation. Excellent filtering effect, all polypropylene structure, hot-melt welding, no adhesiv
CMP
55ºC
0.10 μm
Wetprocess
Espro-N6/N66
Filter Cartridges / Non-disposables
ESPRO
N6/N66 series Photoresist Filters
N6/N66 series photoresist filter cartridges are made of nylon microporous membrane and processed by advanced fusion welding process.
Photoresist
80ºC
0.10 μm