
ESPRO
esPRO® is a leading wet process solutions provider in the semiconductor field, offering filters, heaters, pumps, flowmeters, CMP solutions, refurbs and more. As industry leaders, we take pride in sourcing our raw materials exclusively from ultra-high purity suppliers, ensuring the highest quality standards for our products.
Main activities:
- Filtration products
- Process cassettes
- Diaphragm pumps
- Flow meters
- Gas filters
- Immersion heaters
- Inline heaters
- Megasonic transducer Array
- PFA parts
- Quartz tanks
- Tank heater
- SAT & SST tool refurb service
CMP

Filter Capsules / Disposables
PROCESS CASSETTES

Custom Design Process Cassettes

Custom Design Quartz Boats
WETPROCESS

Diaphragm Pumps

Filter Capsules / Disposables

Filter Cartridges / Non-disposables

Filter Housings

Flow Meters

Gas Filters

Heat Exchangers

Immersion Heaters

Inline heaters

Megasonic Transducer Array

PFA Air Separators

PFA Aspirators

PFA Containers

PFA Drain Pipe Manifolds

PFA Exhaust Pots

PFA Mixers

PFA Nozzles

PFA OEM And Storage Tank

PFA Pressure Vessels

PFA Special Fittings

PFA Storage Vessels

PFA Tubing & Piping

Quartz Tanks

Spray Acid Tool (refurb) SAT

Spray Solvent Tool (Refurb) SST

Tank Heater

Ultra-pure DI-water Heaters
The latest ESPRO products
Wetprocess
Espro-NN6/NN66
Filter Cartridges / Non-disposables
ESPRO
NN6/NN66 series photoresist filter cartridges are made of nylon microporous membrane and processed by advanced fusion welding process.
Photoresist
120ºC
0.10 μm
Wetprocess
Espro-CFRS
Filter Capsules / Disposables
ESPRO
CFRS capsule filter, for semiconductor industries, effectively removes metal ions and ensures a stable output of ultrapure water.
Water
40ºC
Wetprocess
Espro-CMP-RF
Filter Cartridges / Non-disposables
ESPRO
CMP-RF depth filter is rolled with multilayer graded PP membrane. These PP media have a continuously tapered pore structure. Economical for polishing solutions.
CMP
80ºC
0.10 μm
Wetprocess
Espro-CMP-PP
Filter Cartridges / Non-disposables
ESPRO
The CMP-PP series utilizes multi-layer imported PP membranes as filter media. High contamination holding capacity, all-polypropylene structure
CMP
80ºC
0.10 μm
Wetprocess
Espro-CFCME
Filter Capsules / Disposables
ESPRO
Used in CMP applications, has a compact structure and easy operation. Excellent filtering effect, all polypropylene structure, hot-melt welding, no adhesiv
CMP
55ºC
0.10 μm
cmp
Espro-CFCMP
Filter Capsules / Disposables
ESPRO
Used in CMP applications, has a compact structure and easy operation. Excellent filtering effect, all polypropylene structure, hot-melt welding, no adhesiv
CMP
55ºC
0.10 μm
cmp
Espro-CFCMC
Filter Capsules / Disposables
ESPRO
Used in CMP applications, has a compact structure and easy operation. Excellent filtering effect, all polypropylene structure, hot-melt welding, no adhesiv
CMP
55ºC
0.10 μm
Wetprocess
Espro-N6/N66
Filter Cartridges / Non-disposables
ESPRO
N6/N66 series photoresist filter cartridges are made of nylon microporous membrane and processed by advanced fusion welding process.
Photoresist
80ºC
0.10 μm