CFCMC Capsule Filter

esPRO’s CFCMC Capsule Filter is specifically designed for CMP (Chemical Mechanical Planarization) slurry filtration, offering a compact structure and ease of operation. The CFCMC series provides exceptional filtration of impurities and gels in CMP slurry through its advanced gradient filtration system, effectively extending the filter’s service life.

This model features a four-port design, including inlet, outlet, vent, and drain ports, ensuring flexible system integration and enhanced filtration efficiency by facilitating better flow management and ease of maintenance.
Featuring an all-polypropylene (PP) construction, the CFCMC capsule filter is assembled using a hot-melt welding process, ensuring no adhesives are used, thus maintaining the cleanliness and integrity of the filtration system. The filter media utilizes PP/PP+ nanofiber membranes, leveraging esPRO's patented spin nano fiber technology, which delivers superior filtration performance compared to conventional filter media.

With an 85mm diameter and available in 5” or 10” lengths, the CFCMC filter operates at a maximum temperature of 55ºC and can withstand a maximum differential pressure of 0.6 MPa, making it suitable for high-demand CMP slurry applications. The filter comes with seven different removal ratings, providing adaptability to a variety of filtration needs.

The CFCMC Disposable Capsule Filter is engineered for reliability and longevity, providing a robust solution for maintaining cleanliness in CMP processes while ensuring efficient removal of contaminants, enhanced flow management, and ease of use with its four-port configuration.