CFCME Capsule Filter

esPRO’s CFCME Series CMP Capsule Filter is designed specifically for CMP (Chemical Mechanical Planarization) applications, offering superior filtration of impurities and gels in CMP slurry. The CFCME filter utilizes a unique and patented polypropylene spin nano fiber media, which provides advanced gradient filtration, extending the filter’s service life by effectively capturing a wide range of particle sizes.

The CFCME series features a compact structure for easy operation, making it ideal for use in confined or space-sensitive systems. Constructed with an all-polypropylene (PP) shell, this filter series is assembled using a hot-melt welding process, eliminating the need for adhesives and ensuring clean, reliable filtration.

Measuring 206mm in length, the CFCME capsule filters are designed to handle high-performance filtration tasks while maintaining a small footprint. They are capable of operating at temperatures up to 55ºC and can withstand a maximum differential pressure of 0.6 MPa, making them suitable for high-pressure CMP processes.

With its patented nano fiber technology and advanced filtration capabilities, the CFCME Series CMP Capsule Filters provide a reliable and efficient solution for industries requiring the highest levels of cleanliness in CMP slurry filtration. These filters ensure optimal performance and longevity in even the most demanding applications.