Conax Technologies

Conax Technologies
For more than 70 years, Conax Technologies has been a trusted manufacturer of high-performance compression seal fittings, temperature sensors, cable assemblies, and pressure/vacuum feedthroughs for demanding semiconductor applications. Their engineering expertise enables both standard and custom solutions that deliver reliable performance in high-temperature, high-vacuum, and high-pressure environments. Innovative products such as the patented EtchDefender™ and dual-seal Combo Fittings help customers improve process reliability while reducing the risk of leaks and equipment downtime.

Precision thermocouples for semiconductor furnaces
Conax designs and manufactures Profile and Spike Thermocouples for both vertical and horizontal furnaces used throughout the semiconductor industry. Available in standard and custom configurations, these high-precision temperature sensors provide the accuracy and stability required for critical thermal processes in semiconductor, photovoltaic, and LED manufacturing.

Dual-seal combo fittings for leak prevention
Vacuum leaks can lead to costly downtime, product loss, and potential safety risks. Conax Combo Fittings are engineered with a dual-seal design that provides independent seals for both the thermocouple sheath and the internal wires. If the sheath becomes damaged or fails, the secondary seal maintains vacuum integrity, helping protect your process and reduce the risk of catastrophic leaks.

Custom pressure & vacuum feedthrough solutions
Conax manufactures standard and custom Pressure/Vacuum Feedthroughs for a wide range of semiconductor process equipment. Every solution is engineered to provide dependable sealing, long service life, and easy integration into existing systems.

Typical applications include:

• HAST feedthroughs for highly accelerated stress testing
• Redundant thermocouple probes with dual-seal protection for crystal growth and ingot furnaces
• Custom sensor and flange assemblies for simplified maintenance and faster sensor replacement
• Process control thermocouples for deposition and thin-film manufacturing
• Thermocouple wire feedthroughs for transmitting temperature measurements through vacuum chambers
• Electrical feedthroughs for supplying power to chamber heating elements
   

Contact us for our complete portfolio of standard and customizable Conax products! We're happy to advise you on your processes.