Triple-point calibration thermocouple for Barrel Reactors
Triple-point calibration thermocouple for Barrel Reactors
Triple-point calibration thermocouples
Conax Triple-Point Calibration Thermocouples are designed for fast, accurate calibration of infrared (IR) temperature measurement systems used in epitaxial wafer processing. Available as OEM replacements or custom-engineered solutions, these sensors help improve calibration accuracy, reduce maintenance time, and ensure consistent temperature control.
Simultaneous three-point calibration
Developed for use with Applied Materials/Moore Technologies 76XX, 77XX, and 78XX Series Epitaxial Barrel Reactors, the Triple-Point thermocouple features three precisely positioned measurement junctions. This enables all three IR sensors to be calibrated simultaneously, eliminating the need to reposition a single-junction sensor between measurements.
By calibrating all three sensors at once, users benefit from:
- Reduced calibration time
- Improved measurement repeatability
- Greater process consistency
- Increased equipment uptime
Precision-manufactured and factory-calibrated
Each Triple-Point Calibration Thermocouple is manufactured to tight tolerances to ensure accurate and repeatable results. Every sensor is supplied with a two-temperature calibration certificate, typically at 1100°C and 1200°C, or at customer-specified calibration temperatures.
Standard construction includes:
- C-Type thermocouple wire
- Inconel sheath material
- Precisely positioned three-junction design
Custom materials and configurations are available to meet specific process requirements.
Inspection & recalibration services
To maintain calibration accuracy and extend sensor service life, Conax offers an annual inspection and recalibration service. As part of this service, each Triple-Point sensor undergoes a detailed inspection, including X-ray analysis of the internal construction to verify its condition and identify potential wear before it affects process performance.
Whether you need a replacement sensor, a custom design, or periodic recalibration, Conax and SPS provide the expertise and support to help maintain accurate temperature measurement in critical epitaxial processing applications. Contact us with your requirements and we'll happily work with you to find the best solution!
