Thermocouples for Epitaxial Reactors

Conax Semiconductor Temperature Sensors
Conax Technologies manufactures high-precision temperature sensors designed for the demanding requirements of semiconductor processing. Every sensor is built using premium materials, assembled in a controlled, clean environment, and thoroughly tested to deliver the accuracy, reliability, and long service life critical to thermal processing applications.

Premium materials for reliable performance
The performance of a temperature sensor starts with the quality of its components. Conax uses only carefully selected materials to ensure consistent measurement accuracy and long-term reliability.

Key features include:

• Platinum and platinum/rhodium wires manufactured from virgin mined ores, never recycled materials
• Semiconductor-grade quartz available in three quality levels
• High-purity ceramic insulators (99.5% or higher) that are fired to remove organic contaminants
• Laser-engraved connectors with unique serial numbers for full traceability

Precision manufacturing and quality control
Every Conax sensor is assembled by experienced, certified technicians using controlled manufacturing processes that ensure consistent product quality.

Manufacturing highlights include:

• Electronic work instructions and revision-controlled production processes
• Rigorous inspection and testing throughout every stage of assembly
• Precision laser welding that minimizes the heat-affected zone (HAZ) while producing strong, reliable thermocouple junctions
• Manufactured in AS9100 and ISO 9001 certified facilities

Cleanroom-Inspired Assembly
To minimize contamination, Conax manufactures its sensors in a controlled assembly environment that incorporates cleanroom practices.

This includes:

• Laminar flow workstations to reduce airborne particles
• Cleanroom apparel and gloves worn during assembly
• Magnification equipment for precise inspection and assembly

Custom - Designed for your process
Every semiconductor process has unique thermal requirements. Conax offers one of the industry's most flexible sensor design programs, allowing customers to configure sensors that match their exact application.

Starting from seven quartz sheath thickness options and four wire diameter options, Conax can create 28 base sensor configurations, which can then be further customized to meet specific process requirements. Today, the company manufactures more than 450 different sensor part numbers and offers cross-reference support for numerous OEM designs, making it easy to find a compatible replacement or develop a custom solution.

Extend sensor life with EtchDefender™
Conax's patented EtchDefender™ technology helps extend the service life of quartz thermocouple sheaths in aggressive semiconductor processing environments. By applying a proprietary quartz coating, EtchDefender™ can increase sheath life by up to three times while reducing replacement costs by an estimated 35% to 45%.

EtchDefender™ benefits

• Up to 3× longer quartz sheath life
• Reduced operating and replacement costs
• Improved resistance to quartz erosion
• Slower quartz devitrification
• Increased durability in demanding process environments
• Proven in both laboratory and production testing
• No particle generation during operation
   

Got interested? We offer both standard and custom Conax Thermocouples. Contact us with your requirements, and we'll happily discuss all options for your process with you!