Single-point calibration thermocouple for Barrel Reactors

Single-point Calibration Thermocouples
Conax Single-Point Calibration Thermocouples are designed for accurate calibration of infrared (IR) temperature measurement systems used in epitaxial wafer processing. Engineered for reliability and precision, these sensors help maintain accurate susceptor temperature measurements, ensuring consistent process control and high-quality wafer production.

Accurate IR Sensor Calibration
Designed for use with Applied Materials/Moore Technologies 76XX, 77XX, and 78XX Series Epitaxial Barrel Reactors, the Single-Point Calibration Thermocouple is used to verify the calibration of the three IR sensors that monitor susceptor temperature during processing.

The sensor is positioned sequentially to calibrate each IR sensor individually, providing a straightforward and reliable method for routine calibration and maintenance.

Designed for Reliable Performance
Conax Single-Point Calibration Thermocouples are manufactured using high-quality materials to deliver accurate and repeatable measurements in demanding semiconductor processing environments.

Standard construction includes:

• K-Type thermocouple wire
• Haynes® 214 alloy sheath
• Precision-built single-junction design for accurate IR sensor calibration

Whether used as a replacement sensor or as part of a preventive maintenance program, Conax Single-Point Calibration Thermocouples provide dependable performance for maintaining accurate temperature control in epitaxial reactor systems. Contact us with your requirements, and we'll happily work with you to find the best solution!