ANRIC
Anric Technologies was founded by researchers from Harvard University to address the gap in the market for benchtop ALD tools designed and optimized for universities, start-ups, companies exploring ALD, starting pilot line production and specialized manufacturing.
Full line of desktop ALD systems and equipment for research to pilot lines, from thermal ALD equipment to plasma ALD equipment. Products avaliable from 2" up to 8" (200 mm)
Main Activities:
- Desktop ALD systems
THIN-FILMS
ALD Systems
The latest ANRIC products
Thin-Films
AT410
ALD Systems
ANRIC
Table-Top Atomic Layer Deposition ALD System, suitable for up to 5 lines. Substrate size up to 4" (100mm) diameter (Other Wafer Sizes on Request!)
Thin-Films
AT610
ALD Systems
ANRIC
Table-Top Atomic Layer Deposition ALD System, suitable for up to 5 lines. Substrate size up to 6" (150mm) diameter
thin-films
AT200M
ALD Systems
ANRIC
The AT200M utilizes semiconductor grade components. Metal-sealed lines and a robust PLC driven user interface, fast cycling and high-quality single component th
