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Quartz Tanks
(1)Megasonic Transducer Array
(1)Max. Carrier Capacity
4 inch
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8 inch
Max. Inside Vessel Dimensions (mm)
196.85 (L) x 196.85 (W) x 177.8 (D)
196.85 (L) x 196.85 (W) x 254 (D)
304.8 (L) x 279.4 (W) x 298.45 (D)
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Process & Megasonic
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Category
Quartz Tanks
(1)Megasonic Transducer Array
(1)Max. Carrier Capacity
4 inch
6 inch
8 inch
Max. Inside Vessel Dimensions (mm)
196.85 (L) x 196.85 (W) x 177.8 (D)
196.85 (L) x 196.85 (W) x 254 (D)
304.8 (L) x 279.4 (W) x 298.45 (D)
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wetprocess
ESPRO-EQ
Quartz Tanks
ESPRO
These esPRO® Constant Temperature Controlled Baths are designed to be contaminant-free, rapid heating units suitable for wafer processing in wet etch,