Wetprocess

Process equipment for heated DI water and
chemical supply, including chemical pumps, PFA
fittings and process baths or wet etch equipment.

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Category
Megasonic Cleaning Systems
(3)
Quartz Tanks
(1)
Megasonic Transducer Array
(3)
MegPie
(16)
Material
Housing: PEEK
Housing: PEEK, PCTFE
Housing: PVC
Applicable Wafer
12”
4”
6”
8”
Flow Rate
>0.9L/min
0.5-3.0L/min

Megasonic Cleaning Systems

3products
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wetprocess
ESPRO-MC-Series
Megasonic Cleaning Systems
ESPRO
ESPRO® Megasonic Unit Array
4”, 6”, 8”, 12”
0.5-3.0L/min
wetprocess
ESPRO-MP-Series
Megasonic Cleaning Systems
ESPRO
ESPRO® Megasonic Plate
6”, 8”, 12”
wetprocess
ESPRO-MS-Series
Megasonic Cleaning Systems
ESPRO
ESPRO® Megasonic Nozzle - Shower Type
>0.9L/min