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FPD-PECVD
With the increase in size of LCD panels and glass need of manufacturing, manufacturing equipment has also become larger, requiring ever-larger equipment investments.SYSKEY systems offer processes for amorphous silicon (a-Si), silicon oxide (SiOx), silicon nitride (SiNx), silicon oxynitride (SiON) and multi-layer depositions.
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thin-films
FPD-PECVD-sys
FPD-PECVD
SYSKEY TECHNOLOGY Co., Ltd.
With the increase in size of LCD panels and glass need of manufacturing, manufacturing equipment has also become larger, requiring ever-larger equipment investm
