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150 MM
(4)
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(2)
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(3)
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(4)
Options POLOS
(10)
Chuck
(11)
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(5)
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(2)
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(1)
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(2)
Material
NPP
PTFE
Wafer size
4" (100 mm)
6" (150 mm)
Substrate size
100 mm
100 x 100 mm
127 x 127 mm
150 mm
50 x 50 mm
75 mm
Type
Mechanical Chuck
Vacuum Chuck

Chuck

11products
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photolitho
B-V36-CP4-S75-PP Vacuum Chuck - With Centering Pins
26545
Chuck
POLOS
4" (100 mm)
75 mm
Vacuum Chuck
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photolitho
E-CP6-S127x127-PP Mechanical Chuck - Square Substrates
26560
Chuck
POLOS
6" (150 mm)
127 x 127 mm
Mechanical Chuck
View product
photolitho
C-CP6-S150-PP Mechanical Chuck - With Centering Pins
27048
Chuck
POLOS
6" (150 mm)
150 mm
Mechanical Chuck
View product
photolitho
A-V36-S45-PP Vacuum Chuck - Without Centering Pins
28082
Chuck
POLOS
Vacuum Chuck
View product
photolitho
A-V36-S45-PTFE Vacuum Chuck - Without Centering Pins
28082PTFE
Chuck
POLOS
Vacuum Chuck
View product
photolitho
K-V87-S100x100-PP Vacuum Chuck - For Embedded Substrates
31006
Chuck
POLOS
6" (150 mm)
100 x 100 mm
Vacuum Chuck
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photolitho
A-V87-S96-PP Vacuum Chuck - Without Centering Pins
31252
Chuck
POLOS
Vacuum Chuck
View product
photolitho
A-V36-S45-PP-HD Vacuum Chuck - Without Centering Pins
31857
Chuck
POLOS
Vacuum Chuck
View product
photolitho
H-CP4-S100-PP Mechanical Chuck - Cleaning and Drying
35914
Chuck
POLOS
4" (100 mm)
100 mm
Mechanical Chuck
View product
photolitho
K-Vx-S50x50-PP Vacuum Chuck - For Embedded Substrates
38313
Chuck
POLOS
50 x 50 mm
Vacuum Chuck
View product
photolitho
C-CP6-S150-PP-HD Mechanical Chuck - Round Wafer (With Centering Pins)
42342
Chuck
POLOS
150 mm
Mechanical Chuck
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