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spare-parts
A3010
2nd Source AMAT Legacy robot replacement bearings, parts and services
SPARETECH
300 mm wrist Asm
OEM number: 0020-75700  or 0010-17402 or 0010-17407 or 0010-29842
XP™ Robot
0020-75700 / 0010-17402 / 0010-17407 / 0010-29842
Thin-Films
AT410
ALD Systems
ANRIC
AT410-1 ALD System
Table-Top Atomic Layer Deposition ALD System, suitable for up to 5 lines. Substrate size up to 4" (100mm) diameter (Other Wafer Sizes on Request!)
(4") 100 mm
Up to 330°C
Table-top system
Thin-Films
AT610
ALD Systems
ANRIC
AT610 ALD System
Table-Top Atomic Layer Deposition ALD System, suitable for up to 5 lines. Substrate size up to 6" (150mm) diameter
(6") 150 mm
Up to 330°C
Table-top system
cmp
CLFC300
Flow Controllers
Tokyo Keiso CO., LTD.
CLFC300 Ultrasonic flow controller
wafer-shipping
Coinstack-shipper
Clamshell Style Shipper
ePAK
Coinstack shipper 12" (300 mm)
12” (300mm) Coinstack single wafer shippers are used for safe transportation, storage and handling or your wafers or substrates.
12" (300 mm)
300 mm
0,8 mm
2 Sizes:
Coinstack shipper 12" (300 mm) Conductive PPCoinstack shipper 12" (300 mm) Natural PP 
Thin-Films
DC-1300
Diffusion Heating Elements
THERMCRAFT
Duracraft - Diffusion Furnace Element
400°C to 1300°C
Stainless Steel
Standard
Thin-Films
DC-1300Plus
Diffusion Heating Elements
THERMCRAFT
Duracraft - Diffusion Furnace Element
400°C to 1300°C
Stainless Steel
Self-locking
Thin-Films
DCHT-500
Diffusion Heating Elements
THERMCRAFT
Duracraft - Diffusion Furnace Element
400°C to 1300°C
Stainless Steel
Self-locking
wafer-handling
Diamond Wire (LED)
Diamond Wire
SAESOL
Diamond Wire (LED)
A diamond tool used in the wire-sawing step as part of the semiconductor wafering process; The main function is for slicing sapphire and silicon ingot.
230~250µm
LED
photolitho
DS-PER-X15
Options POLOS
POLOS
DISPENSER PERFORMUS X15
Performus™ X15 dispenser system increase throughput, improve yields, and reduce production costs through controlled application of adhesives, lubricants,
spare-parts
E2001
2nd Source AMAT Legacy robot replacement bearings, parts and services
SPARETECH
OEM number: 3060-01746
Producer® Robot
3060-01746
wafer-shipping
eFD0009-eM-04-H-PNK
Foam Cushion Disk
ePAK
Foam Cushion Disk 12" (300 mm)
12" (300mm) Foam Cushion Disk made of  ESD sensitive cushioning material - Closed-Cell Polyethylene with a foam diameter of 300 mm and 3 mm thickness
300 mm (12")
3 mm
300 mm
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