Duracraft - Diffusion Furnace Element

Duracraft - Diffusion Furnace Element

Diffusion furance element for cost-effective high temperature operation.

The advanced thermal engineering of the DC-1300 furnace elements provide dependable performance at the lowest cost. Power is balanced between center and end zones, providing precise temperature uniformity at varied operating temperatures while reducing heat loss.

For all high temperature processes including silicon nitride and HTO LPCVD, oxidation, anneal, and drive-in. Ideal for horizontal furnace retrofits.

Specifications:

• Operating Temperature: 400°C - 1300°C
• Shell: Stainless Steel
• Wire: Kanthal™ APM Heavy gauge powered metal FeCrAl
• Inner Coating: Zirconia Oxide
• Spacers: Standard
• Bore Size: Please specify

Insulation:

• Layer 1: 97% Alumina blanket against heating element
• Layer 2: 50% Alumina / 50% Silica blanket

Application:

• Vertical or Horizontal
• LPCVD and Oxidation/Diffusion processes
• Up to 1300°C applications

With typical lifetime of 5 year at low to mid temperature range.