Diffusion furance element for high temperature operation with improved performance for temperature cycling.
The addition of self-locking spacers to the DC-1300 design allow the DC-1300Plus furnace elements to provide consistent, reliable operation throughout the fluctuations of repeated temperature cycling.
Ideal for all high temperature processes including silicon nitride and HTO LPCVD, oxidation, anneal, and drive-in.
The Benefits of Self-Locking Spacers
Rows of self-locking spacers lock together around the circumference of the element, maintaining constant coil spacing and total support of each turn of the resistance coil. This design keeps the coil and spacers in place throughout repeated temperature cycling.
Specifications:
- Operating Temperature: 400°C - 1300°C
- Shell: Stainless Steel
- Wire: Kanthal™ APM Heavy gauge powered metal FeCrAl
- Inner Coating: Zirconia Oxide
- Spacers: Self-locking
- Bore Size: Please specify
Insulation:
- Layer 1: 97% Alumina blanket against heating element
- Layer 2: 50% Alumina / 50% Silica blanket
Application:
- Vertical or Horizontal
- LPCVD and Oxidation/Diffusion processes
- Up to 1300°C applications
With a typical lifetime of 5 year at low to mid temperature range.
