Wafer handling products
WHS-T3 Manual slide transfer wafer flipping/inverting 100 mm (4”)
Wafer handling products
WHS-T3 Manual slide transfer wafer flipping/inverting 100 mm (4”)
Choose option:
Antistatic construction with wafer and cassette ground paths
Maintenance-free precision slide rails
Chemical resistant materials
Wafer flipping/inverting
ISO 4 compatible
Brand
Wafer handling products
Product Number
WHS-T3-402
Remarks
*** NOTE: Please specify cassette model number(s) when ordering ***
Material
Anti-Static/Natural Polypropylene
Wafer size
100 mm (4”)
System
Manual system
Slots
Up to 25
Material arm
Antistatic Polyoxymethylene
Cleanroom designation
ISO 4 (FS209E Class 10)
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100 mm (4”)
Automatic System
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Antistatic Polyoxymethylene
ISO 4
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SafeGuard Thin/Compound
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100 mm (4”)
Automatic system
Up to 25
Carbon fiber
ISO 3
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The WHS-M1 Series MCF is an all aluminum 100 mm (4") 25-slot metal cassette for processing semiconductor wafers in a thermal environment, up to 350° C.
(4”) 100 mm
T6061 aluminum alloy
(HC) hard clear anodization
350° C
ISO 3 (Class 1 FS209E)